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Metal Impurities in Silicon- and Germanium-Based Technologies
Cor Claeys , Eddy Simoen
This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their...

Editeur : Springer
Parution : 2018-08-13
Collection : Springer Series in Materials Science
PDF, ePub

168,79 €