Ebooks de Michael A. Lieberman en PDF et EPUB

1 Livre(s)
Télécharger le livre : Principles of Plasma Discharges and Materials Processing
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Principles of Plasma Discharges and Materials Processing
Allan J. Lichtenberg , Michael A. Lieberman
A new edition of this industry classic on the principles of plasma processing Plasma-based technology and materials processes have been central to the revolution of the last half-century in micro- and nano-electronics. From anisotropic plasma etching on microprocessors,...

Editeur : Wiley
Parution : 2024-08-28

PDF, ePub

125,49 €